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Four sources high vacuum thermal evaporation coater
This equipment is a four-source high-vacuum evaporation coater. The equipment adopts a front-opening door vacuum chamber design. In addition, the chamber is increased to 500mm. The distance between the sample stage and the evaporation source has a larger adjustment range, which can adapt to various evaporation needs. It avoids the sample being damaged by the high temperature of the evaporation source.
The chamber adopts an top sample stage, the sample stage can be rotated, heated and lifted, and all operations can be integrated and controlled through the touch screen. The equipment vacuum system is a two-stage vacuum system composed of a two-stage rotary vane pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment. The equipment is equipped with a pneumatic valve system. Through the automatic control of the operating system, the user can perform operations such as one-button vacuum pumping, non-stop take out and place sample, and complete shutdown from the touch screen.
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800ºC. It can realize multi-layer coating or mixed coating of multiple materials.
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Four source high vacuum evaporation coating equipment |
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Sample stage |
Size |
Maximum support φ150mm samples |
Height |
Adjustable up and down 140mm |
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Evaporation source |
Quantity |
Tungsten Boat x4 |
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Vacuum chamber |
Chamber size |
φ325mm x 510mm |
Observation window |
Front φ100mm with shading plate |
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Chamber material |
304 stainless steel |
Open method |
Front door opening |
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Film thickness control |
Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller |
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Vacuum system |
Backing pump |
Two stage rotary vane pump |
Pumping port |
KF16 |
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Secondary pump |
Turbomolecular pump |
Pumping port |
CF160 |
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Vacuum measurement |
Resistance + ionization Compound vacuum gauge |
Exhaust rate |
Mechanical pump 1.1L/s |
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Ultimate vacuum |
1.0E-5Pa |
Power supply |
Molecular pump 600L/s |
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Control system |
PLC automatic control Operation interface: touch screen + operation panel |
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Others |
Supply voltage |
AC220V,50Hz |
Overall size |
1000mm x 800mm x 1500mm |
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Total power |
10kW |
Total Weight |
350kg |
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Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
Suppliers with verified business licenses
Audited Supplier 
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