| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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1200 Degree PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a Titable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four Channel MFC Gas Delivery and High Performance Vacuum Pump. Such a complete system is an excellent tool for heat treating inorganic compound powders with superior temperature and surface coating uniformity.
| System Structure |
0~25° adjustable tilt frame assists smooth powder loading/unloading Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces the needs for high-temperature process Gear driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity Four channel gas mixing station with MFCs provide precise control of gas delivery The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing |
Two-Zone Rotary Furnace |
Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating Two PID temperature controllers with 30 segments programmable. Input Power: 208 - 240VAC, single phase at max. 2.5KW. High purity Alumina fibrous insulation for max. energy saving Gear DC motor drives quartz tube with variable speed 2 - 10 RPM Split cover enables faster cooling and easy operation Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature. |
Plasma RF Power Supply |
Output Power: 5 -300W adjustable with ± 1% stability. RF frequency: 13.56 MHz ±0.005% stability. Reflection Power: 100W max. Matching: Automatic RF Output Port: 50 Ω, N-type, female Noise: <50 dB. Cooling: Air cooling. Power: 208-240VAC, Single Phase, 50/60Hz |
| Evaporation Boat | Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating 0.7ml alumina crucible with tungsten heating coil surrounded. S type thermocouple insert for accurate temperature measurement of the source material. 500W DC evaporation power supply with max. operating current @ 30Amps |
| Sealing Flanges |
Standard: 4'' O.D Fused quartz processing tube One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use |
| Sealing Flanges |
A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the foreline or downstream attachments (such as gas, powder and electrical delivery lines |
| Tube Rotation Speed | 0 - 5 RPM variable |
| Furnace Tilt Angle | 0~30° |
| Vacuum Pump & Gauge |
EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale KF25 adapter and stainless steel bellows are connected between pump and tube flange 10E-2 Torr vacuum can be achieved inside the processing tube Note: Vacuum Gauge is available at additional cost |
| MFC Gas Mixing Station | Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. MFC 1: Gas flow range from 0~100 SCCM MFC 2&3: Control range from 0~200 SCCM MFC 4: Control range from 0~500 SCCM Gas inlet/outlet fittings: 6mm O.D tube fitting Power: 208-240VAC 50/60Hz Stainless steel needle valves for manual ON/OFF control of gas supply. Large PLC touch screen control enable easy flow rate settings |
Temperature Control |
Two heating zone design with individual temperature controller Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for Built-in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). +/- 1 ºC temperature accuracy. Three K-type thermocouples (one for each zone). RS485 Communications Port. |
| Warranty | One year limited warranty with lifetime support |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
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