| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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TN-SPC-1-LD is a magnetron sputtering gun with a flexible head capable of accommodating a wide range of 1" Dia. sputtering sources. Its compatibility with DC, pulsed DC and RF power supplies ensures maximum versatility and extends its usage to various sputtering targets (e.g. metallic, electrically insulating, magnetic or non-magnetic, and etc). Furthermore, its high vacuum design makes the use of Argon under low-pressure levels improves the quality of coating through reducing gas collisions inside the chamber.
Circular rare-earth Nd-Fe-B magnets isolated from cooling water are implemented into the design for minimizing water-to-vacuum interfaces that are typically found in other sputtering sources. These magnets are field replaceable and make the sputtering gun easy to operate and maintain. The installation of this apparatus is straight forward and it also offers simple target changes that do not require any target bonding.
Specifications
|
Features |
High field strength and uniform field profile achieved via use of electromagnetic finite element calculations in the design of the permanent magnetic assembly Low impedance sputtering head and standard RF connector easily match and interface with a wide range of DC and RF sputtering power supplies. Easy installation with common tools. Magnets are isolated from cooling water with the protective coating against corrosion to maximize durability. Sputtering source is bakeable up to 200°C 1" Copper Backing Plate is included. Standard ¾" OD Shaft Accepts 1/8" (3 mm) thick targets; 1 piece of copper target is included as standard accessory |
|
Sputtering Gun |
Sputtering Head Diameter: 1.82" (46.3mm) Target Diameter: 1.0 ± 0.02" (25.4mm) Maximum Target Thickness: 1/8" (3mm) Magnets: NdFeB Rare Earth Magnet Shaft Diameter: 3/4" O.D. |
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Electrical Connector |
Standard HN Female Connector is included (DC and RF) Optional SL16 cable Connector 148 cm RF cable is recommended with extra cost |
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Power Requirement |
DC (Max.) 250 W RF (Max.)100 W |
|
Cathode Sputtering Current |
3 Amp (Max.) |
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Cathode Sputtering Voltage |
200 - 1,000 V |
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Operating Pressure Range |
~1 mTorr to 1 Torr |
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Water Cooling (Required) |
Flow Rate requirement: 1/2 GPM, filtered Water Inlet Temperature: <20 C Water hook up: 0.25" O.D. quick disconnects |
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Electrical & Mounting Fittings |
Electrical Connector: Standard HN type (DC and RF) High Vacuum Quick Disconnect is included. |
|
Overall Length |
14 inches |
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Net Weight |
3 lbs |
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Tilt Assembly |
The sputtering head can be tilted +/- 45 degrees for adjusting the incidence angle of bombardments to improve the sputtering yield. Scribe lines on the tilt assembly offer precise angle adjustments. |
|
Warranty |
One year limited with lifetime support |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to useMade in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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