After-sales Service: | 12 Months |
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Warranty: | 12 Months |
Type: | Coating Production Line |
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This is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 targets according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials.
The instrument is equipped with 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.
Application of single target head plasma sputtering coater:
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
sample stage | Size | φ60mm | Temperature control accuracy | ±1ºC |
Heating temperature | Max 500ºC | Rotate speed | 1-20rpm adjustable | |
DC sputtering target head | Quantity | 2"×1 | ||
Vacuum chamber | Chamber size | φ180mm×150mm | Watch window | Omnidirectional transparent |
Chamber material | High purity quartz | Opening mode | Top cover removable | |
Vacuum system | Mechanical pump | Rotary vane pump | Pumping interface | KF16 |
Vacuum measurement | Resistance gauge | Exhaust interface | KF16 | |
Ultimate vacuum | 1.0E-1Pa | Power supply | AC;220V 50/60Hz | |
Pumping rate | rotary vane vacuum pump: 1.1L/S | |||
Power configuration | Quantity | DC power supply×1 | Max output power | 150W |
Other parameters | Supply voltage | AC220V,50Hz | Overall size | 500mm×320mm×470mm |
Total power | 800W | Total Weight | 30kg |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory, with mature technical experience, and can guarantee the quality of products and the optimal price.