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Audited Supplier Thin film thickness deposition rate monitor for magnetron sputtering coater
TM106 is a high precision thickness sensor/monitor for the thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal's oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub-Angstrom (0.037 Å for this equipment).
The film thickness monitor is suitable for measuring the thickness of vacuum coating such as resistance evaporation, electron beam evaporation, magnetron sputtering and ion plating. Through the touch screen and digital tube display, you can get complete deposition data, using more advanced software and hardware equipment, further improving the anti-interference ability of the instrument.
Features of film thickness monitor
Specifications of film thickness monitor
| Crystal frequency | 6MHz (Optional 2.5M 3M 5M 9M crystal) |
| Display mode | 5 "color touch screen + digital tube display rate and solid thickness |
| Operating mode | Touch screen |
| Thickness display range | 0-99μ9999Å |
| Thickness display resolution | 1Å(aluminium) |
| Rate display range | 0-999.9Å |
| Rate display resolution | 0.1Å/s |
| Number of coating layers | 99 |
| Probe input | 4 way (choose one to work) |
| Tool factor | 0.01-99.99 |
| Material storage | 257kinds+10 customization |
| Communication | RS232/RS485 |
| Baffle / source control | 2 sets of contacts, reaching the thickness shutoff / evaporation source |
| Coating display | Rate curve / value |
| Coating circuit times | 99 |
| Size | 480×250×89mm(2U 19") |
We can ship the plasma RF generator by sea, by air, by land, by Express, also can arrange the shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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