| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Magnetron Sputtering |
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Magnetron sputtering coating machine sputtering coater for nano film deposition
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Single target DC magnetron sputtering coater equipment is a cost-effective magnetron sputtering coating equipment independently researched and developed by our company. It has the characteristics of standardization, modularization and customization. Magnetron targets can be selected from 1 inch, 2 inches and 3 inches, and customers can choose according to the size of the plated substrate; The power supply is a 1500W high-power DC power supply, which can be used for high-energy metal sputtering coating. According to experimental requirements, DC or RF power supplies of other specifications can also be selected to achieve coating operations of various materials.
Specifications of magnetron sputtering coating machine
| magnetron sputtering coater | ||||
| Sample stage |
Size | φ100mm | Heating | Max. 500ºC |
| Rotating speed | 0-20 adjustable | |||
| Sputter Gun | Quantity | 2inch*1 | ||
| Vacuum chamber | Chamber size | Φ180mm x 215mm | Observation window | Front φ60mm |
| Chamber material | SS304 | Opening method | Top cover open | |
| Vacuum system | Backup pump | Rotary vane pump | Pumping interface | KF16 |
| Molecular pump | Turbomolecular pump | Pumping interface | KF40 | |
| Vacuum measurement | Resistance gauge + ionization gauge | Exhaust interface | KF16 | |
| Ultimate vacuum | 1.0E-4Pa | Power supply | AC 220V 50/60Hz | |
| Pumping rate | Mechanical pump: 1.1L/s Molecular pump: 60L/S | |||
| Power configuration | Quantity | DC power supply x1 | Maximum output power | DC power supply 300W |
| Other | Supply voltage | AC220V, 50Hz | Dimensions | 550*350*400mm |
| Total power | 2kW | |||
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, target can be designed at the top or bottom of the chamber.
2. 1~1000W DC or RF power supply is available.
3. Different target material is optional
4. Magnetron sputtering coater with evaporation, e-beam is available
5. Customized magnetron sputterign coater is available
WE can ship the magnetron sputtering coating machine by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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