Dual Target Magnetron Sputtering Coater Machine with Reciprocate Sample Stage

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Model NO.: TN-MSH500S-100F-II-DCRF-SS
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Cooling Mode: Water Cooling
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Substrate Size: Diameter 185mm
• Vacuum Chamber: Stainless Steel
• Magnetron Sputtering Target Head: 2 Magnetron Sputtering Heads
• Sample Stage Size: Maximum 4" Substrate Can Be Placed
• Rotated Speed: 1-20 Rpm (Adjustable)
• The Highest Heating Temperature: 500ºC
• Temperature Control Accuracy: +/- 1.0 °c
• Gas Flow Controller: 2 Mass Flow Meters Installed Inside The Instrument
• Vacuum Pump: a Set of Molecular Pump System, Using One-Button O
• Cooling System: 16L/Min.
• Transport Package: Fumigated Wooden Box
• Specification: 290mmx365mmx260mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Dual target magnetron sputtering machine with reciprocating sample stage

Product Description

This is a laboratory-specific magnetron sputtering coater with two target positions developed by our company. The equipment is equipped with a DC power supply and a radio frequency power supply, which can be used to prepare single or multilayer iron Electrical film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.

Features

1. Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and speed, high coating rate, low sample temperature rise, and is a typical high-speed low-temperature sputtering.
2. The magnetron sputter target is equipped with a water-cooled interlayer. The water-cooled machine can effectively take away the heat and avoid the heat accumulation on the target surface, so that the magnetron sputter can work stably for a long time.
3. The sample stage adopts a reciprocating design, and the left side is equipped with a magnetic coupling push rod, which can push the sample stage left and right.
4. The whole machine adopts touch screen control, built-in one-button coating program, easy to operate, it is an ideal equipment for laboratory preparation of films

Product Parameters

Technical parameter

Model		TN-MSH500S-100F-II-DCRF-SS
Input		AC220V,50Hz
Total power		6KW
Ultimate vacuum degree		5x10-4Pa
Sample table parameters	Size	100mm x 100mm
	Reciprocating stroke	200mm
Magnetron sputtering head parameters	Quantity	2-set,2-inch
	Cooling mode	Water cooled,required flow rate10L/min
	Water chiller	10L/min circulating water cooling
Vacuum chamber	Size	φ500mm X 490mm H
	Material	Stainless steel
	Watch window	φ100mm
	Open mode	front opening door
Gas flow controller		1channel 200sccm Ar;
Vacuum pump		Molecular pump system pumping600L/S
Film thickness gauge		Quartz vibrating film thickness gauge ,one set,Resolution 0.10 Å
Sputter power supply		DC power supply:one set,500W,for preparing metal films RF power supply:one set,500W,for non - metallic coating
Operating mode		All-in-one computer operation
Overall dimensions		1090mm X 900mm X 1250mm
Total weight		350kg

Detailed Photos

 

 

 

 

FAQ

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

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