Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films

Product Details
After-sales Service: 12 Months
Warranty: 12 Months
Type: Coating Production Line
Gold Member Since 2023

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  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
  • Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
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  • Overview
  • Detailed Photos
  • Company Profile
  • FAQ
Overview

Basic Info.

Model NO.
TN-MSH300S-DCDCRF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Cooling Mode
Water Cooling
Heating Temperature
Max 500ºC
Rotate Speed
1-20rpm Adjustable
Substrate Size
Diameter 185mm
Vacuum Chamber
Stainless Steel
Magnetron Sputtering Target Head
3 Magnetron Sputtering Heads
Sample Stage Size
Maximum 4" Substrate Can Be Placed
Rotated Speed
1-20 Rpm (Adjustable)
The Highest Heating Temperature
500ºC
Temperature Control Accuracy
+/- 1.0 °c
Gas Flow Controller
2 Mass Flow Meters Installed Inside The Instrument
Vacuum Pump
a Set of Molecular Pump System, Using One-Button O
Cooling System
16L/Min.
Transport Package
Fumigated Wooden Box
Specification
1090mm*900mm*1250mm
Trademark
TN
Origin
China
HS Code
8486209000
Production Capacity
200/Month

Product Description

 Lab Triple Target Coater with Magnetron Target and Vibration Table
for Non-Metallic and Metallic Films

 

Brief-introduction
Three target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, which has the characteristics of standardization, modularization and customization.

The equipment can be used to prepare single-layer or multi-layer ferroelectric films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, polytetrafluoroethylene films, etc.

DC power supply can be used for the preparation of metal films, RF power supply can be used for the preparation of non-metallic films, and the three targets can meet the needs of multi-layer or multiple coating. Compared with similar equipment, the three-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material films in the laboratory.

 Technical parameters
Three target magnetron sputtering coating  machine (DC power supply + RF power supply)
Sample
table
Sputtering mode Sputtering orientation upwards, the sample stage is located above the
sputtering target;
Center top setting sample holder, with one shutter
Sample holder φ150mm
Control accuracy ±1ºC
Heating range Room temperature~500ºC
Adjustable speed 1-20rpm adjustable
Target base distance
adjustable
The distance   between the target and the substrate can be adjusted electrically
 
 
Magnetron
target gun
Target plane Circular plane   target
Sputtering   vacuum 10Pa~0.2Pa
Target   diameter 50~50.8mm
Target   thickness 2~5mm
Note: if the target is magnetic material (such as Fe, Co, Ni), the  thickness cannot be more than 1.5mm, and strong magnetic sputtering gun is required,  
will need extra charge.
Insulation voltage >2000V
Quantity 2 inches*3;with shutters   for each gun
Cable   specification SL-16
Target head   temperature <=65ºC
 
Vacuum
 chamber
Inner wall   treatment Electrolytic polishing
Chamber size φ325mm * 500mm
Chamber   material 304 stainless   steel
Observation   window Quartz window, diameter φ100mm with shutter
Open method Top opening, cylinder auxiliary support
 
 
 
 
 
 
 
 
 
 
 
Gas control system
Flow control 1-way mass   flow meter:
Oxygen: range   0~100SCCM or
Argon gas:   range 0~200SCCM or
Nitrogen: range 0~500SCCM
(Note: In order to achieve a higher oxygen-free   environment, the vacuum
chamber must be cleaned with high-purity inert gas at   least 3 times.)
Gas type Argon, nitrogen, oxygen, and other inert gases
Control valve   type Solenoid valve
Control valve   static state Normally   closed
Measuring   linearity ±1.5% F.S
Measurement repeatability ±0.2% F.S
Measuring   response time ≤8 seconds(T95)
Working   pressure range 0.3MPa
Valve body   pressure 3MPa
Working   temperature (5~45)ºC
Body material Stainless steel 316L
Valve body   leakage rate 1×10-8Pa.m3/s
Pipe joints 1/4Compression fitting
Input and   output signal 0~5V
Power supply ±15V(±5%)(+15V  50mA,    -15V 200mA)
Overall   dimensions (mm) 130 (width) ×   102 (height) × 28 (thickness)
Communication   Interface RS485 MODBUS protocol
DC power supply Power supply 500W
Output voltage 0~600V
Maximum output   current 1A
Timing length 65000 S
Starting time 1~10 S
Quantity 2 sets
RF power
supply
Power supply 500W
Power output   range 0W-500W, with auto match
Maximum  reflected power 100W
RF frequency 13.56MHz+/-0.005%   stability
Power   stability ≤5W
Harmonic   component less than   -50dbc
Quantity 1 set
Detailed Photos

Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films

Company Profile

 

Lab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic FilmsLab Triple Target Coater with Magnetron Target and Vibration Table for Non-Metallic and Metallic Films
FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.



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