1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

Product Details
After-sales Service: on-Line Service
Warranty: One Year
Application: Industry, School, Lab
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  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
  • 1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • Company Profile
  • Packaging & Shipping
  • FAQ
  • Contact Us
Overview

Basic Info.

Model NO.
TN-PECVD-50R-1200-Q
Customized
Customized
Certification
CE
Structure
Portable
Material
Stainless Steel
Type
Tubular Furnace
Product Name
CVD Tube Furnace
Tube Material
High Purity Quartz
Temperature
1200c
Heating Zone
200mm*1
Furnace Tube Size
50*450mm
Key Words
CVD Furnace
Transport Package
Fumigated Wooden Box
Specification
1000*800*1500mm
Trademark
TN
Origin
China
HS Code
8401200000
Production Capacity
20 Sets Per Month

Product Description

1200C Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
 

Product Description

 

1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

1. This CVD system is specially designed for graphene production, using a 1200ºC mini tube furnace, equipped with a high-
     precision mass flow meter and a thin-film vacuum gauge.

2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the
    type of gas, which is very suitable for the vacuum coating process.

3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air
    outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.


4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.
Product Parameters

Specifications of CVD tube furnace

RF power supply Output Power 150W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Air-cooling
1200ºC Single heating zone tube furnace Supply voltage AC220V,50Hz
Maximum power 2KW
Heating zone Single heating zone 200mm
Working temperature Maximum 1200 ºC, continuous operating temperature should be ≤1100 ºC
Temperature accuracy ± 1 ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Three temperature zone independent control, with overheat and thermocouple failure protection
Furnace tube material High purity quartz
Furnace tube size Dia. 50x800mm
Sealing method Vacuum stainless steel flange, KF16 flange
Adjustable speed 0-20rpm
slope 0-15°
Vacuum pump Rotary vane mechanical pump
Ultimate vacuum 1.0E-1Pa
Feeding method Vacuum funnel and screw feed
Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

Company Profile

Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.

Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.

Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.

If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

Contact Us

SHALL WE DISCUSS YOUR PROJECT?

Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.

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