1200c Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-PECVD-50R-1200-Q
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: CVD Tube Furnace
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• Key Words: CVD Furnace
• Transport Package: Fumigated Wooden Box
• Specification: 1000*800*1500mm
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

1200C Low Vacuum Rotary CVD Furnace with 3-Channel Flowmeter
 

Product Description

 

1. This CVD system is specially designed for graphene production, using a 1200ºC mini tube furnace, equipped with a high-
     precision mass flow meter and a thin-film vacuum gauge.

2. Compared with the conventional Pirani resistance gauge, the reading of the thin film gauge is accurate and not affected by the
    type of gas, which is very suitable for the vacuum coating process.

3. The CVD tube furnace is equipped with a combustible gas detection device, which is linked with a solenoid valve at the air
    outlet. Once there is a leakage, the solenoid valve can be closed to ensure safety.

4. The CVD tube furnace comes with footprint and is very suitable for laboratory preparation of CVD.

Product Parameters

Specifications of CVD tube furnace

RF power supply	Output Power	150W
	Output accuracy	±1%
	RF frequency	13.56MHz
	RF stability	±0.005%
	Cooling method	Air-cooling
1200ºC Single heating zone tube furnace	Supply voltage	AC220V,50Hz
	Maximum power	2KW
	Heating zone	Single heating zone 200mm
	Working temperature	Maximum 1200 ºC, continuous operating temperature should be ≤1100 ºC
	Temperature accuracy	± 1 ºC
	Temperature control method	AI-PID 30-stage process curve, can store multiple Three temperature zone independent control, with overheat and thermocouple failure protection
	Furnace tube material	High purity quartz
	Furnace tube size	Dia. 50x800mm
	Sealing method	Vacuum stainless steel flange, KF16 flange
	Adjustable speed	0-20rpm
	slope	0-15°
	Vacuum pump	Rotary vane mechanical pump
	Ultimate vacuum	1.0E-1Pa
	Feeding method	Vacuum funnel and screw feed

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

Company Profile

Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.

Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.

Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.

If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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