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Audited Supplier Plasma Enhanced CVD System PECVD Graphene Machine With13.56 MHz RF Power
Specifications of PECVD system
| Three-heating zone tube furnace | Model | TN-1200X-III-50IC |
| Tube material | High purity quartz | |
| Tube diameter | 50mm | |
| Tube length | 1000mm | |
| Furnace chamber length | 660mm | |
| Heating zone length | 200mm+200mm+200mm | |
| Operating temperature | 0~1100ºC | |
| Temperature control accuracy | ±1ºC | |
| Temperature control mode | 30 or 50 segment program temperature control | |
| Display mode | LED (highlight digital tube display) | |
| Sealing method | 304 stainless steel vacuum flange | |
| Flange interface | 1/4" cutting sleeve joint (Ø8 pagoda joint) | |
| Vacuum | 4.4×10E-3Pa | |
| Power supply | AC:220V 50/60Hz | |
| Single-heating zone tube furnace | Model | TN-O1200-50IC |
| Tube material | High purity quartz | |
| Tube diameter | 50mm | |
| Tube length | 1000mm | |
| Furnace chamber length | 440mm | |
| Heating zone length | 400mm | |
| Constant temperature zone | 200mm | |
| Operating temperature | 0~1100ºC | |
| Temperature control accuracy | ±1ºC | |
| Temperature control mode | 30 or 50 segment program temperature control | |
| Display mode | LED (highlight digital tube display) | |
| Sealing method | 304 stainless steel vacuum flange | |
| Flange interface | 1/4" cutting sleeve joint (Ø8 pagoda joint) | |
| Vacuum | 4.4×10E-3Pa | |
| Power supply | AC:220V 50/60Hz | |
| RF output system | Power range | 0~500W adjustable |
| Working frequency | 3.56MHz+0.005% | |
| Working mode | Continuous output | |
| Display mode | LCD | |
| Matched impedance mode | Can match, the glow is evenly covered with three heating zone furnace tubes | |
| Power stability | ≤2W | |
| Normal working reflected power | ≤3W | |
| Amplified reflected power | ≤70W | |
| Harmonic component | ≤-50dBc | |
| Machine efficiency | ≥70% | |
| Power Factor | ≥90% | |
| Supply voltage / frequency | Single-phase AC (187V~153V) Frequency 50/60Hz | |
| Control mode | Internal control / PLC analog / RS232 / 485 communication | |
| Power protection settings | DC overcurrent protection, power amplifier over temperature protection, reflected power protection | |
| cooling method | Forced air cooling | |
| Glow length | In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones. | |
| Gas supply system | Four-channel mass flowmeter | Beijing Qixing Huachuang, mass flowmeter |
| Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar, |
|
| measurement accuracy | ±1.5%F.S | |
| Repeatability | ±0.2%FS | |
| Linear precision | ±1%F.S. | |
| Response time | ≤4s | |
| Work pressure | -0.15Mpa~0.15Mpa | |
| flow control | LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control | |
| Intake interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
| Outlet interface | Can be connected to 1/4NPS or 6mm outer diameter stainless steel tube | |
| Connection method | Double cutting sleeve joint | |
| Operating temperature | 5~45ºC | |
| Gas premix | Equipped with gas premixing device | |
| Exhaust system | Mechanical pump | GHD-031B |
| Pumping rate | 4L/S | |
| Exhaust interface | KF16 | |
| Vacuum measurement | Pirani gauge | |
| Ultimate vacuum | 1×10E-1Pa | |
| Power supply | AC:220V 50/60Hz | |
| Pumping interface | KF40 | |
| Mechanical pump | GHD-031B | |
| Rail | Rail length | 2.5m~3m It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall. |
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
CVD-- tube furnace with 1200C single heating zone CVD / PECVD-- tube furnace with 1200C triple heating zone PECVD-- roll- to- rollPECVD-- rotary typePlasma enhanced HPCVD systemDCCVD system (Hot cathode direct current plasma CVD)
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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Audited Supplier 
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