After-sales Service: | 12 Months |
---|---|
Warranty: | 12 Months |
Type: | Coating Production Line |
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1. This type of small plasma sputtering coating machine adopts single-stage sputtering method, which is widely used for SEM
sample preparation or metal coating experiment.
2. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, thermal damage is
barely happen.
3. This small plasma sputtering coater uses PLC +touch screen control system, easy to operate. a rotatable sample stage is
equipped.
4. It comes with small size, suitable for lab research process.
Specifications of plasma sputter coater
Product model | TN-PLZ180-III-DC-Q | |
Sample stage | Size | 100mm |
Distance from sample stage to target surface | 20~35mm height adjustable | |
Rotating speed | 1~20rpm adjustable | |
Heating temperature | ≤500ºC | |
Temperature control accuracy | ±1ºC PID temperature control | |
Plasma sputtering source | Quantity | 2 inches * 3 |
Cooling method | Water cooling/Natural cooling | |
Vacuum chamber | Chamber size | φ180mm x 200mm |
Observation window | Omnidirectional visibility | |
Chamber material | High purity quartz | |
Open method | Top cover removable | |
Upper and lower cover material | 304 stainless steel | |
Pumping port | KF16 | |
Intake port | 1/4 inch ferrule connector | |
Power configuration | Quantity | DC power supplyx1 |
Output power | Max. 150W | |
Sputtering power | 1200V | |
Max. sputtering current | 50mA | |
Vacuum system | Vacuum pump type | Dual-stage rotary vane vacuum pump |
Pumping port | KF16 | |
Exhaust interface | KF16 | |
Pumping rate | 1.1L/s(4m3/h) | |
Ultimate vacuum | ≥0.1Pa | |
Vacuum measurement | Resistance vacuum gauge | |
Others | Power supply | AC 220V 50Hz |
Total power | 1.5kW/2kW | |
Dimension | 570mm x 450mm x 500mm | |
Weight | 30kg |
Notes:
1. We have plasma sputter coater with 1/2/3 target,
2. Water cooled target, rotation substrate is optional
3. Heating substrate is available
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory, with mature technical experience, and can guarantee the quality of products and the optimal price.