Mini Single Target Plasma Sputtering Coater for Sem

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Model NO.: TN-PLZ180-I-DC-Q
• Condition: New
• Sample Size: φ138mm
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Chamber Size: φ180mm×150mm
• Chamber Material: High Purity Quartz
• Mechanical Pump: Rotary Vane Pump
• Vacuum Measurement: Resistance Gauge
• Opening Mode: Top Cover Removable
• Total Power: 800W
• Power Supply: AC;220V 50/60Hz
• Max Output Power: 150W
• Total Weight: 30kg
• Transport Package: Wooden Box
• Specification: 360mm× 300mm× 470mm
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 220/Month

Product Description

Mini Plasma Sputtering Coater with 100mm Substrate for Sem

Product Description

 

1. This type of small plasma sputtering coating machine adopts single-stage sputtering method, which is widely used for SEM
    sample preparation or metal coating experiment.

2. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, thermal damage is
    barely happen.

3. This small plasma sputtering coater uses PLC +touch screen control system, easy to operate. a rotatable sample stage is           
    equipped.

4. It comes with small size, suitable for lab research process.

 

 

 

Product Parameters

Specifications of sinlge target plasma sputter coater
 

Sample stage	Size	100mm
	Distance from sample stage to target surface	20~35mm height adjustable
	Rotating speed	1~20rpm adjustable
	Heating temperature	≤500ºC
	Temperature control accuracy	±1ºC PID temperature control
Plasma sputtering source	Quantity	2 inchesx1/2/3
	Cooling method	Water cooling
Vacuum chamber	Chamber size	φ180mm x 150mm
	Observation window	Omnidirectional visibility
	Chamber material	High purity quartz
	Open method	Top cover removable
	Upper and lower cover material	304 stainless steel
	Pumping port	KF16
	Intake port	1/4 inch ferrule connector
Power configuration	Quantity	DC power supplyx1
	Output power	Max. 150W
	Sputtering power	1200V
	Max. sputtering current	50mA
Vacuum system	Vacuum pump type	Dual-stage rotary vane vacuum pump
	Pumping port	KF16
	Exhaust interface	KF16
	Pumping rate	1.1L/s(4m3/h)
	Ultimate vacuum	≥0.1Pa
	Vacuum measurement	Resistance vacuum gauge
Others	Power supply	AC 220V  50Hz
	Total power	1.5kW/2kW
	Dimension	500mm x 450mm x450mm
	Weight	30kg

 

 

Detailed Photos

Notes:
1. We have plasma sputter coater with 1/2/3 target, 
2. Water cooled target, rotation substrate is optional
3. Heating substrate is available

Single target plasma sputter coater

Dual target plasma sputter coater

Triple target plasma sputter coater

 

 

 

 

 

 

Company Profile

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our  own design team and factory, with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements to find the most suitable way.

More questions, please contact me.