| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | 1 Year |
| Type: | Spin Coating |
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Lab CuO, NiO, CdO deposition nano film Pulsed Laser Deposition PLD Coating System
The PLD series equipment is mainly used to grow optical crystals, ferroelectrics, ferromagnets, superconductors and organic compound thin film materials, especially suitable for the growth of complex layered superlattice thin film materials with high melting point, multi-element and containing gas elements.
The equipment can be divided into five parts according to the appearance structure: PLD deposition chamber, vacuum measurement system, vacuum pumping system, workbench, and electric control cabinet.
2.1 PLD deposition chamber
Spherical vacuum chamber structure, size Φ450mm, made of 1Cr18Ni9Ti stainless steel material, argon arc welding, surface spray glass shot matte treatment. The vacuum leakage rate is less than 5.0×10-8Pa.I/S. The interface is sealed with a metal gasket or a fluorine rubber ring, and a Φ220 cylinder below the vacuum chamber is installed on the work surface. CF150 knife-edge flange is connected below, and CF150 manual gate valve is connected. Connect the CF150 bypass pipe assembly and connect the 620 molecular pump system. In front of the vacuum chamber, there is a rubber ring sealed door with an observation window, with a diameter of Φ150mm, which is used for sample entry and exit and target material replacement and maintenance. Install the rotating target platform on the left side of the observation window. Install the sample heating table directly opposite the rotating target table. On the same horizontal plane as the rotating target platform, at an angle of 135°, two incident observation windows with a diameter of Φ100mm are arranged. Equipped with infrared and ultraviolet quartz each. Above the vacuum chamber, there is an operation with a diameter of Φ100mm and two test observation windows. There are also two CF35 spare flange ports for equipment upgrades. The vacuum chamber body is equipped with resistance gauge, ionization gauge, KF40 manual pre-pumping angle valve, Φ10 manual vent valve, and CF35 baking lighting electrode.
2.1.1 Rotating target stage
1). Four targets can be installed one time, the size of the target: (i) Φ60mm~Φ25mm;
2). Each target material can realize self-rotation, the speed is 5-50 rpm, continuously adjustable, and controlled by the magnetic coupling mechanism driven by the stepper motor;
3). The target position revolution transposition mechanism is controlled by a magnetic coupling mechanism driven by a stepper motor;
4). The target shielding cover shields the three targets, and only one target is exposed for sputtering to form a film at a time to avoid cross-contamination between the targets.
2.1.2 Sample heating stage components
1). Substrate size: Φ60mm, can place Φ10mm-Φ60mm samples, adopt mechanical fixing method, and replace the sample by replacing the substrate cover;
2). The maximum temperature of sample heating is 800ºC±1ºC; it is controlled by thermocouple closed-loop feedback; (Special heaters can be made for oxide research)
3). The substrate can rotate continuously, the speed is 5~50 rpm, which is completed by a stepping motor driving the shaft mechanism;
4). The distance between the target and the substrate can be adjusted at 20-80mm, which is completed by the manual bellows adjustment mechanism outside the moving substrate cavity;
2.1.3 Window accessories
1). Φ100mm quartz glass window (248nm ultraviolet band, for laser incidence)
2). Φ100mm quartz glass window (infrared band)
3). Φ100mm optical glass window
2).1.4 Vacuum pumping system
Equipped with 1 KYKY-160/620 molecular pump,
Equipped with 1 2XZ-8B mechanical pump,
Equipped with 4 Ф40 bellows pipes.
Equipped with 1 air release valve,
Equipped with 2 KF40 with vent solenoid vacuum angle valves,
Equipped with 1 KF40 with inflatable electromagnetic vacuum angle valve,
Equipped with 1 CF150 manual gate valve,
Equipped with 2 CF35 manual angle valves,
Equipped with a set of molecular sieve
2.1.5 Vacuum Path
Equipped with two channels mass flowmeter, N2 gas calibration. 100 SCCM. Enter through the gas mixing tank and through the manual angle valve.
2.1.6 Vacuum measurement system
The vacuum measurement system consists of a measuring gauge and a vacuum gauge. The machine is equipped with direct insertion resistance gauges and metal ionization gauges. Measure the vacuum degree of atmosphere~2x10-5Pa.
2.1.7 Workbench
The workbench is composed of a frame and a hoard. The rack is the skeleton of the equipment, installing the supporting parts. Install gas path, water drain and other components inside.
2.1.8 Electric control cabinet
The electric control cabinet is equipped with a touch screen control unit, a flow display, a substrate heating power supply, an ionization power supply, a 620L molecular pump power supply, and a total power supply.
1). The vacuum control unit is controlled by PLC + touch screen, which controls the vacuum pumping system, sample rotation movement process and lighting system.The touch screen is a 7-inch color screen.
2). The substrate and the organic heating control power supply are composed of conductive SR3 meter. The temperature control accuracy is ±0.5ºC. The maximum heating temperature is 800ºC.
3). Flow indicator One Belt Two.
4). The ionization power supply is used to clean the substrate, 3KW/1KW.
5). FF160/620 molecular pump power supply controls the start, stop and operation of the molecular pump.
6). At the bottom is the main power area box. When the air switch is closed, the equipment is powered on as a whole. With phase sequence alarm.
Specifications of Pulsed plaser coating machine
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Main vacuum system |
Sphere structure, size: dia. 450mm |
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Loading sample system |
Vertical cylindrical stucture, size: dia. 150×150mm |
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Vacuum system configuration |
Main vacuum chamber |
Mechanical pump, molecular pump, valve |
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Loading sample system |
Mechanical pump and molecular pump(sharing with primary chamber), valve |
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Ultimate pressure |
Main vacuum system |
≤6*10-6Pa(after baking and degassing) |
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Loading sample system |
≤6*10-3 Pa(after baking and degassing) |
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Vacuum recovery system |
Main vacuum system |
It can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping) |
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Loading sample system |
It can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping) |
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Rotating target platform |
The maximum size of the target is about 60mm. Four target materials can be installed at one time, target changing in revolution motion; each target can rotate independently, rotation speed: 5-60 rpm |
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Substrate heating platform |
Sample size |
Dia. 51 |
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Mode of motion |
Substrate rotates continuously, rotation speed:5-60 rpm |
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Heating temperature |
Maximum temperature of substrate heating: 800ºC±1ºC, Controlled and adjustable |
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Gas circuit system |
1-circuit mass flow controller, 1-circuit inflation valve |
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Optional accessories |
Laser device |
Compatible with coherent 201 laser |
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Laser beam scanning device |
2D scanning mechanical platform, perform two degree of freedom scanning. |
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Computer control system |
The contents of control include common conversion target, target rotation, sample rotation, sample temperature control, laser beam scanning, etc. |
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Floor Space |
Main unit |
1800 * 1800mm2 |
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Electric cabinet |
700 *700mm2(one) |
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Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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