• Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
  • Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
  • Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
  • Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
  • Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
  • Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing

Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing

After-sales Service: 12 Months
Warranty: 12 Months
Certification: CE
Gas Supply System: Gas Flow Flowmeter
RF Power Output Power: 50W
Cooling Method: Water Cooling
Gold Member Since 2023

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Henan, China
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  • Overview
  • Product Description
  • Product Parameters
  • Detailed Photos
  • Company Profile
  • FAQ
Overview

Basic Info.

Model NO.
TN-OTF-1200X-II-PEC3-Q
Vacuum Pump
Bipolar Rotary Vane Vacuum Pump
Working Temperature
<=1200c
Mass Flowmeter
Three-Way
RF Frequency
13.56MHz
Ultimate Vacuum
10^-1PA
Heating Zone
Dual Zones 200mm+200mm
Transport Package
Standard Export Fumigation Sign Wooden Box Package
Trademark
TN
Origin
Henan China
HS Code
8486209000
Production Capacity
5000/Month

Product Description

Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing

 

Product Description

The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a  roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200ºC2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment.
 

Product Parameters

 

Tube furnace
 
Item Detail
Voltage AC220V,50Hz
Max power 3KW
Heating zone Dual zones 200mm+200mm
Working temperature ≤1200ºC
Temperature control accuracy ±1ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1400mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Resistance gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
Vacuum pump Bipolar rotary vane vacuum pump
Ultimate vacuum 10^-1Pa
Three-way mass flowmeter
 
Item Detail
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (Ar)
0~200 SCCM(H2)
0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz
RF power supply
 
Item Detail
Output Power 500W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Water cooling
 
Detailed Photos

Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing





 
Company Profile

 


Plasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film GrowingPlasma Enhanced Chemical Vapor Deposition Equipment (PECVD) with Rewinding and Unwinding Device for Silicon Nitride Film Growing
FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made-in-China Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact me.
 

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Gold Member Since 2023

Suppliers with verified business licenses

Manufacturer/Factory
Main Products
Evaporation Coater; Film Coater
Number of Employees
13