| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Magnetron Sputtering |
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Lab Dual Target Magnetron Sputtering Coater with Bottom Sputtering Target
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Features of magnetron sputtering coater:
1. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;
Specifications of magnetron sputtering coater:
| Produce Name | Magnetron sputtering coater | |
| Input | AC220V,50Hz | |
| Total power | 6KW | |
| Ultimate vacuum degree | 5x10-4Pa | |
| Sample table parameters | Size | 150 Dia. |
| Height | 70 mm adjustable | |
| Heating | ≤500ºC | |
| Rotation speed | 1-20 rpm | |
| Magnetron sputtering head parameters | Quantity | 2-set,2-inch |
| Cooling mode | Water cooled,required flow rate10L/min | |
| Water chiller | 10L/min circulating water cooling | |
| Vacuum chamber | Size | 500mmDia. × 490mm H |
| Material | Stainless steel | |
| Watch window | 100mm Dia. | |
| Open mode | front opening door | |
| Gas flow controller | 1channel 200sccm Ar; | |
| Vacuum pump | Molecular pump system pumping,600L/S | |
| Film thickness gauge | Quartz vibrating film thickness gauge , one set,Resolution 0.10 Å |
|
| Sputter power supply | DC power supply:one set,500W,for metal films RF power supply:one set,500W,for non-metallic films |
|
| Operating mode | All-in-one computer operation | |
| Overall dimensions | 1090mm X 900mm X 1250mm | |
| Total weight | 350kg | |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 tagrst, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Pernanent magenetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
WE can ship the magnetron sputtering coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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