| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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Sputtering is a process of plasma based deposition in which energetic ions are accelerated towards the target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
1. Triple target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable.
2. There are 1-inch, 2-inch and 3-inch magnetron targets. You can choose the target according to the size of the substrate to be coated.
3. The magnetron sputtering coater is equipped with 500W DC power and 500W RF power. The DC power is used for the conductrive materials, and the RF power is used for the insulating materials. Power from 300W to 1000W according to your requirements.
4. The magnetron sputtering coater is equipped with two-channel high-precision mass flowmeter. Four-channel mass flowmeters is
available.
5. The magnetron sputtering coater is equipped with turbo-molecular pump, and the ultimate vacuum is up to 10E-5Pa, other types of molecular pumps are available.
6. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without
shutting down the pump.
7. This product can be equipped with an integrated industrial computer to control the system.
Technical parameters of magnetron sputtering coater:
| Sample stage | Size | Dia.140mm |
| Heating temperature | Max 500ºC | |
| Temperature accuracy | ±1ºC | |
| Rotational speed | 1-20rpm adjustable | |
| Magnetron Sputtering head | Quantity | 2"×3 (1",2" optional) |
| Cooling mode | Water cooling | |
| Water chiller | Circulating water chiller with flow rate of 10L/min | |
| Vacuum chamber | Chamber size | Dia.300mm×300mm |
| Chamber material | Stainless steel | |
| Watch window | Dia.100mm | |
| Opening mode | Top cover open | |
| Mass flowmeter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) | |
| Vacuum system | Model | TN-GZK103-A |
| Molecular pump | CY-600 | |
| Backing pump | Rotary vane pump | |
| Ultimate vacuum | 1.0E-5Pa | |
| Pumping interface | CF160 | |
| Exhaust interface | KF40 | |
| Vacuum measurement | Compound vacuum gauge | |
| Power supply | AC;220V 50/60Hz | |
| Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
|
| Power configuration | Quantity | DC power supply x2 RF power supply x1 |
| Max output power | DC 500 W, RF 500W | |
| Other parameters | Supply voltage | AC220V,50Hz |
| Total power | 4KW | |
| Overall size | 600mm×650mm×1280mm | |
| Total Weight | About 300kg | |
Notes:
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of the chamber.
2. DC power or RF power target is available
3. Different target material is optional
4. Strong magnetic target and Permanent magnetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Triple target magnetron sputter coater with 3*3inch targetTriple target magnetron sputter coater with vibration subrate plateTriple target magnetron sputter coater with transition chamberTriple target magnetron sputter coater with 3 DC power
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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