Wafer Level Large-Size Molybdenum Disulfide Preparation CVD Tube Furnace for Lab

• After-sales Service: 12 Months
• Warranty: 12 Months
• Application: School, Lab
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Model NO.: CVD tube furnace
• Material: Stainless Steel
• Type: Tubular Furnace
• Gas Supply System: Gas Flow Flowmeter
• RF Power Output Power: 50W
• Cooling Method: Water Cooling
• Vacuum Pump: Bipolar Rotary Vane Vacuum Pump
• Working Temperature: <=1200c
• Mass Flowmeter: up to 5ways
• RF Frequency: 13.56MHz
• Ultimate Vacuum: 10^-1PA
• RF: 13.56MHz+0.005%
• Heating Zone: Single Heating Zone 200mm
• RF Power Supply Cooling Method: Air-Cooling
• Furnace Tube Size: Dia. 50*1200mm
• Transport Package: Standard Export Fumigation Sign Wooden Box Package
• Trademark: TN
• Origin: Henan China
• HS Code: 8486209000
• Production Capacity: 5000/Month

Product Description

Wafer level large-size molybdenum disulfide preparation device
 

 

Product Description

Wafer level large-size molybdenum disulfide preparation device
This equipment is a wafer level large-size molybdenum disulfide preparation device designed based on CVD principles. It includes a three-zone tube furnace, a specially designed furnace tube and a set of supporting gas circuits. The equipment can uniformly release the reaction gas into the furnace tube through a specially designed pipeline to ensure the consistency and uniformity of the product on the back-end wafer. It is the best choice for molybdenum disulfide preparation experiments.

 

Product Parameters

 

Product model	CY-O1200-120III-IC-3Z-MoS2
Furnace tube material	High purity quartz
Furnace tube size	External large quartz tube φ120mm x1000mm Internal small quartz tube φ25mm x820mm x7
Temperature zone length	Three heating zone 200mm+200mm+200mm
Temperature control accuracy	±1ºC
Temperature curve	Independent temperature control in three temperature zones, each temperature zone can be set with 30-segment time temperature curve
Operating temperature	0~1150ºC
Heating rate	≤10ºC/min
Intake system	Three-channel mass flow meter Ar gas 0~500sccm N2 gas 0~200sccm H2 gas 0~200sccm Equipped with seven channels of gas separation, gas mixing gas path.
Furnace pipe flange	Stainless steel water-cooled flange, equipped with KF16 vacuum interface, mechanical vacuum gauge and stainless steel needle valve
Power requirements	AC 220V 50Hz 4kW
Control mode	7-inch touch screen
Vacuum pump	Dual stage rotary vane vacuum pump
Vacuum	Theoretical ultimate vacuum degree 10^-1Pa

 

 

Detailed Photos

Related photos of PECVD Vacuum Furnace



 

 

Company Profile

 

FAQ

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact me.