| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Application: | Industry, School, Lab |
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Plasma Enhanced Hybrid Physical Chemical Vapor Deposition system HPCVD machine
Specifications of CVD with 1200C tube furnace
| Two heating zone tube furnace | Product model | TN-PE-HPCVD-50R-1100-Q | |
| Furnace tube material | High purity quartz | ||
| Tube diameter | 50mm | ||
| Furnace tube length | 1200mm | ||
| Furnace chamber length | 440mm | ||
| Heating zone length | 200mm+200mm | ||
| Operating temperature | 0~1100ºC | ||
| Temperature control accuracy | ±1ºC | ||
| Temperature control mode | 30 or 50 segment program temperature control | ||
| Display mode | HD full color LCD touch screen | ||
| Sealing method | 304 stainless steel vacuum flange | ||
| Power supply | AC: 220V 50/60Hz 2.5kw | ||
| RF output system | Power range | 0~500W adjustable | |
| working frequency | 13.56MHz+0.005% | ||
| Working mode | Continuous output | ||
| Matched impedance mode | It can be matched, and the glow is evenly distributed throughout the furnace tube | ||
| Power stability | ≤2W | ||
| Normal working reflected power | ≤3W | ||
| Amplified reflected power | ≤70W | ||
| Harmonic component | ≤-50dBc | ||
| Overall efficiency | ≥70% | ||
| Power Factor | ≥90% | ||
| Supply voltage/frequency | Single-phase AC (187V~153V) frequency 50/60Hz | ||
| Control mode | Internal control/PLC analog quantity/RS232/485 communication | ||
| Power protection settings | DC over current protection, power amplifier over temperature protection, reflected power protection | ||
| Cooling method | Forced air cooling | ||
| Glow zone | Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube | ||
| Evaporation boat | Working temperature | 1300ºC | |
| Evaporation source | Tungsten wire basket, optional tapered alumina crucible | ||
| Thermocouple | S type thermocouple | ||
| Working current | ≤30A | ||
| Max. power | 500W | ||
| Gas delivery system | Flowmeter | Four-channel mass flowmeter | |
| Flow range | MFC1 range: 0~200sccm MFC2 range: 0~200sccm MFC3 range: 0~500sccm MFC4 range: 0~500sccm Corresponding to gases H2, CH4, N2, Ar. |
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| Measurement accuracy | ±1.5%F.S | ||
| Repeatability | ±0.2%FS | ||
| Linear accuracy | ±1%F.S. | ||
| Response time | ≤4s | ||
| Work pressure | -0.15Mpa~0.15Mpa | ||
| Flow control | LCD touch screen control, digital display, each channel gas contains needle valve for individually control. | ||
| Intake Interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe | ||
| Outlet Interface | It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe | ||
| Connection method | Double ferrule connector | ||
| Operating temperature | 5~45ºC | ||
| Gas premix | Equipped with gas premixing device | ||
| Exhaust system | Product model | TN-GZK103-A | |
| Molecular pump | Turbomolecular pump | ||
| Backing pump | Two-stage rotary vane pump | ||
| Pumping rate | Molecular pump: 600L/S | Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa | |
| Rotary vane pump: 1.1L/S | |||
| Ultimate vacuum | 5×10E-4Pa | ||
| Pumping port | KF40 | ||
| Exhaust interface | KF16 | ||
| Vacuum measurement | Compound vacuum gauge | ||
1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.
2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.
3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.
4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.
5. Tube with different diameter and length is customizable.
6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.
7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
SHALL WE DISCUSS YOUR PROJECT?
Please get in touch and we can collaborate to get you the answers and solutions you need.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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