| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Type: | Thermal Evaporation Coater |
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Large single gun electron beam evaporation coating system for deposition of dielectric film
Electron beam (e-beam) Evaporation--OVERVIEW
During an e-beam evaporation process, current is first passed through a tungsten filament which leads to joule heating and electron emission. High voltage is applied between the filament and the hearth to accelerate these liberated electrons towards the crucible containing the material to be deposited. A strong magnetic field focuses the electrons into a unified beam; upon arrival, the energy of this beam of electrons is transferred to the deposition material, causing it to evaporate (or sublimate) and deposit onto the substrate. Adding a partial pressure of reactive gas, such as oxygen or nitrogen to the chamber during evaporation can be used to reactively deposit non-metallic films.
Electron beam evaporation has many advantages over resistive thermal evaporation. First, the e-beam source is capable of heating materials to much higher temperatures than is possible using a resistive boat or crucible heater. This allows for very high deposition rates and evaporation of high temperature materials and refractory metals such as tungsten, tantalum, or graphite. Second, films deposited by electron beam evaporation can better maintain the purity of the source material; water cooling of the crucible tightly confines the electron beam heating to only the area occupied by the source material, eliminating any unwanted contamination from neighbouring components. Finally, electron beam evaporation sources are available in a variety of sizes and configurations including single or multiple pockets. Pocket indexing using a motorized carousel allows one source to deposit many materials from a single source location.Specifications of Electron Beam Coating Coating System:
| Product name | Electron beam evaporation coating machine |
| Product model | TN-EBH500-SS |
| Service condition | Ambient temperature ranged from 5 to 40ºC |
| Source | Three phase 380V |
| Voltage | 220V 50HZ |
| Power | <20 kW |
| Water gage | <2.5bar |
| Plated layer monitoring | Using SQM160 membrane thickness monitor, the inhomogeneity of coating thickness is less than 6%. |
| Heat lamp | Four halogen heating lamps were used for degassing and one neon lamp for lighting |
| The electrode interface | With a 2-way metal evaporation electrode interface, backup |
| Water cooling system | Water pressure monitoring |
| Observation window | 100mm in diameter, with X-ray filter glass |
| Control system | Touch screen system |
| Vacuum chamber dimensions | Evaporation chamber dimensions: Φ 500 * H500mm |
| Electron gun | New electronic gun, a 6-hole crucible |
| Sample turntable | Sample size: <150mm, the sample table can rotate, the sample table surface and the electron gun surface distance adjustment up and down, the adjustment distance is 200mm-250mm, the sample table can be heated, heating temperature <500ºC. |
| System vacuum degree | A. Limit vacuum: baking for 12~24 hours, continuous pumping, vacuum less than 5x10-5Pa B. Extraction rate: a vacuum <5x10 in 40 minutes, starting from the atmosphere-4Pa C. System leakage rate: after 12 hours of shutdown, measure the vacuum degree of the vacuum chamber is <10Pa |
| The vacuum unit | FB1200 Molecular pump + VRD-16 front stage pump + side extraction valve + gate valve + cut-off valve + composite vacuum meter + coating monitoring vacuum meter interface (standby) |
1. We have thermal evaporation coater with 1/2/3/4/8... evaporation sources, can evaporation metal and organic material
2. Chamber material: High purity quartz--- low vacuum, SS304 chamber-- high vacuum
3. Film thickness monitor is optional
4. Thermal evaporation, E-beam, magnetron sputtering in one machine is available
5. Different material of evaporation source is available
6. Customize thermal evaporation coater according to your process is available
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project. When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We're looking forward to hearing from you.
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