| After-sales Service: | on-Line Service |
|---|---|
| Warranty: | One Year |
| Frequency Range: | 13.56MHz, 27.12MHz, 40.68MHz |
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RF generator/RF Plasma generator for Plasma etching, Plasma cleaning, plasma polymerization
The TN-RFG series RF power supply adopts the current stable and reliable power amplifier and the company's core DC control system, so that the product has very stable performance and high product reliability. Adopt Chinese and English display interface, easy to operate. Mainly used in photovoltaic industry, flat panel display industry, semiconductor industry, chemical industry, laboratory, scientific research, manufacturing, etc.
Features of RF power supply generator
1. Rack installation
2. Adopt full digital control, with convenient and rich operation menu
3. The incoming line has APFC module, which improves the power factor of the input side and reduces the harmonics
4. Stable and reliable power amplifier and DC control module
5. The rated power can still be output when the standing wave is 1.5
6. With a variety of optional communication interfaces, through the communication interface, the power supply can be completely
operated
7. Bright LCD display, intuitive operation
8. With CEX phase synchronization function
9. Triple programmable analog outputs
10. Perfect protection function
Specifications of RF power supply generator
| Input | Input voltage: AC220V±10% 3ΦAC380V±5%(Special specifications can be customized) |
| Input frequency: 47~63Hz | |
| Output | Output frequency: 2MHz,13.56MHz,27.12MHz,40.68MHz |
| Output power: 0.5~5kW | |
| Regulation range of output power: 1~100% | |
| Output impedance: 50Ω+j0 | |
| Output interface: type N | |
| Output mode: continuous, pulse | |
| Pulse frequency: 0.1~10kHz | |
| Duty cycle: 10~90% | |
| Performance index | Power factor: 0.98 |
| Frequency stability accuracy: ±0.005% | |
| Efficiency: 75% (at rated output) | |
| Harmonic: <-45dBc | |
| Stray: <-50dBc | |
| External control interface: analog quantity, communication and synchronization | |
| Communication mode: Standard RS485 communication interface; Optional Ether CAT, industrial Ethernet, etc. |
We can ship the plasma RF generator by sea, by air, by land, by Express, also can arrange the shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
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