Lab Sliding Tube Furnace for CVD Graphene Preparation

• After-sales Service: on-Line Service
• Warranty: One Year
• Application: Industry, School, Lab
• Customized: Customized
• Certification: CE
• Structure: Portable
• Model NO.: TN-O1200-50SDM
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Name: Pecvd System
• Tube Material: High Purity Quartz
• Temperature: 1200c
• Heating Zone: 200mm*1
• Furnace Tube Size: 50*450mm
• RF Power: 150W
• RF Frequency: 13.56MHz
• Transport Package: Fumigated Wooden Box
• Trademark: TN
• Origin: China
• HS Code: 8401200000
• Production Capacity: 20 Sets Per Month

Product Description

Product Description

Lab Sliding Tube Furnace for CVD Graphene Preparation

1. The PECVD system comes with a plasma generator, a triple-heating zone tube furnace, a single-heating zone tube furnace, an
    RF power supply, and a vacuum system.

2.The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56
   Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and
   utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

3. This PECVD system can be used in graphene preparation, sulfide preparation, and nanometer material preparation. Various
    films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on
    the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film
    has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard
    coatings, high-end decoration, etc.

Product Parameters

Specifications of CVD system

Micro tube   furnace	Model	TN-O1200-50SDM
	Tube material	High purity quartz
	Tube diameter	50mm(optional 60mm, 80mm, 100mm)
	Tube length	1400mm
	Furnace chamber   length	300mm
	Heating zone   length	200mm
	Operating   temperature	0~1100ºC
	Temperature   control accuracy	±1ºC
	Temperature   control mode	30 or 50 segment program temperature control
	Display mode	Highlight the digital tube digital display
	Sealing   method	304 stainless steel vacuum flange
	Flange   interface	1/4" ferrule connector, KF16/25/40 joint
	Vacuum	4.4E-3Pa
	Power supply	AC:220V   50/60Hz
Gas supply   system	Model	CY-3F
	Gas channel	3-channel
	Measuring   unit	Gas mass flow meter
	Measuring   range	A channel: 0~100SCCM H2 gas	Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
		B channel: 300SCCM N2 gas
		C channel: 0~500SCCM Ar gas
	measurement  accuracy	±1.0%F.S
	Pipe pressure resistance	3MPa
	Working pressure difference	50~300KPa
	Connecting   pipe	304 stainless steel
	Gas channel	304 stainless steel needle valve
	Interface   specification	1/4" ferrule connector for gas inlet and outlet
Exhaust system	Mechanical pump	Rotary vane pump
	Pumping rate	1.1L/S
	Exhaust interface	KF16
	Vacuum measurement	Resistance gauge
	Ultimate vacuum	1.0E-1Pa
	Power supply	AC:220V 50/60Hz
	Pumping interface	KF16

Detailed Photos

1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.

2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.

3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.

4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.

5. Tube with different diameter and length is customizable.

6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.

7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.

CVD-- tube furnace with 1200C single heating zone 

CVD / PECVD-- tube furnace with 1200C triple heating zone 

PECVD-- roll- to- roll
PECVD-- rotary type
 

Other machines:

Company Profile

Packaging & Shipping

We can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.

FAQ

Q. Are you manufacturer or trading company?
A. We are professional manufacturer of  laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. 

Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.

Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.

Q. How to pay?
A. T T, L / C, D / P, etc.

Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.

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