Dual Target Magnetron Sputter and Thermal Evaporation Composite Coater with CD and RF Power

• After-sales Service: 12 Months
• Warranty: 12 Months
• Type: Coating Production Line
• Model NO.: TN-MS500S-2TA1S
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE
• Condition: New
• Cooling Mode: Water Cooling
• Heating Temperature: Max 500ºC
• Rotate Speed: 1-20rpm Adjustable
• Substrate Size: Diameter 185mm
• Vacuum Chamber: Stainless Steel
• Magnetron Sputtering Target Head: 2 Magnetron Sputtering Heads
• Sample Stage Size: Maximum 4" Substrate Can Be Placed
• Rotated Speed: 1-20 Rpm (Adjustable)
• The Highest Heating Temperature: 500ºC
• Temperature Control Accuracy: +/- 1.0 °c
• Gas Flow Controller: 2 Mass Flow Meters Installed Inside The Instrument
• Vacuum Pump: a Set of Molecular Pump System, Using One-Button O
• Cooling System: 16L/Min.
• Transport Package: Fumigated Wooden Box
• Specification: 290mmx365mmx260mm
• Trademark: TN
• Origin: China
• HS Code: 8486209000
• Production Capacity: 200/Month

Product Description

Dual target magnetron sputter and thermal evaporation composite coater with CD and RF Power

Product Description

The magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).The equipment is mainly composed of stainless steel vacuum chamber, magnetron sputtering target, evaporation source, rotary heating sample table, vacuum pump unit, vacuum measurement gauge, air intake system and control system.

Features:

1. Touch screen operation, temperature control meter detection. Digital parameter interface and automatic operation mode provide users with an excellent research and development platform;
2. The vacuum chamber is made of 304 stainless steel with observation window and baffle. Beautiful shape, fine workmanship, excellent vacuum performance. The main sealing flange is CF series high vacuum sealing flange. Each interface of vacuum chamber is sealed with rubber seal ring, which has excellent vacuum performance and can effectively ensure the coating quality;
3. The target is located at the bottom of the cavity, and the target is upward. The sample table has the function of heating and rotating, which can make the coating effect more uniform;;
4. The vacuum acquisition system adopts two-stage vacuum pump group. The backing pump is mechanical pump with high pumping speed, which can effectively reduce the time from atmospheric pressure to low vacuum. The main pump is turbine molecular pump, which has high pumping speed and faster vacuum acquisition speed. The overall vacuum acquisition system is clean and fast.

Product Parameters

Model	TN-MS500S-2TA1S
Sample table	Size	150mm Dia.	Heating	≤500ºC
	Rotation speed	1-20r/min	Temp control	±1ºC
Magnetron sputter head	Quantity	2-inch ×2	Cooling mode	Water cooled
Thermal evaporation	evaporator source	Tungsten wire basket	Max temp	1500ºC
	Thermocouple	S type
Vacuum chamber	Size	300mmDia.× 300mmH	Watch window	100mm Dia.
	Material	304 SUS	Open mode	Front opening door
Vacuum system	Mechanical pump	Rotary vane pump	Extraction interface	KF16
	Pumping	1.1L/s
	Molecular pump	Turbo molecular pump	Extraction interface	CF150
	Pumping	600L/s	Exhaust interface	KF40
	Vacuum gauge	Resistance gauge + ionization gauge
	Ultimate vacuum degree	1.3x10-4Pa	Power supply	AC;220V 50/60Hz
Sputter power supply	DC power supply	1 set	Output power	≤1000W
	Output voltage	≤600W	Response time	<5ms
	RF power supply	1 set	Output power	≤1000W
	Power stability	≤5W
	RF frequency	13.56MHz	RF stability	±0.005%
Film thickness gauge	Resolution	±0.03Hz	Accuracy	±0.5%
	Upper range limit	50000	Speed	100~1000ms
Water cooled system	Tank volume	9L	Flow	10L/min
Gas system	Flowmeter type	MFC(mass flow meter)	Range	200sccm
	Gas type	Ar
Other	Input supply	AC220V,50Hz	Size	1400x750x1300mm
	Total power	4kw(host+vacuum pump)	Weight	295kg

New sample stage is available

Sample	Size	For Dia.150mm sample max.	Height	70mm adjustable
	Rotation speed	1~20rpm	Heating	0~500ºC

Detailed Photos

 

 

Company Profile

 

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to useMade in China Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.