| After-sales Service: | 12 Months |
|---|---|
| Warranty: | 12 Months |
| Type: | Coating Production Line |
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CY-600-2HD is a compact magnetron sputtering system with dual 2" target sources.The DC source for metallic film coating, and the other RF source for non-metallic material coating . This coating system is designed for coating both single or multiple film layers, such as alloy, ferroelectric, semiconductor, ceramic etc 's film coating.
| Input Power | 1.220VAC 50/60Hz, single phase 2.2000W (including pump) |
| Source Power | 1.Two sputtering power sources are integrated into one control box |
| 2. DC source: 500W for coating metallic materials | |
| 3.RF source: 600W with automatching for coating non-metallic materials ( Center) | |
| 4.Compact 300 RF source is available at extra cost | |
| Magnetron Sputtering Head | 1.Two 2" Magnetron Sputtering Heads with water cooling jackets are included One is connected to RF power supply for no-conductive materials Another is connected to DC sputtering power source for coating metallic materials |
| 2.Target size requirement: 2" diameter | |
| 3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets | |
| 4.One stainless steel and one Al2O3 ceramic targets are included for demo testing | |
| 5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads |
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| 6.Customized coater: Two DC head without, RF sputtering, RF head without DC sputering,3 RF head are available upon request |
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| Vacuum Chamber | 1.Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel |
| 2.Observation Window: 100 mm diameter | |
| Sample Holder | 1.Sample holder size: 140mm dia. for. 4" wafer max |
| 2.Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating | |
| 3.The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C |
|
| Gas Flow Control | 1.Flow rate: 200 ml/min max. |
| 2.Flow rate is adjustable on the 6" touch screen control panel | |
| Vacuum Pump Station | High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level |
| Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed |
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| Mobile pump station is included and the compact sputtering coater can be put on top of station |
|
| Max. vacuum level: 10^-6 torr with chamber baking | |
| Thickness Monitor | One Precision quartz thickness sensor is built into the chamber to monitor coating thickness with accuracy 0.10 Å |
| LED Display Unit outside chamber can: | |
| Input material to be coated according to data base included | |
| Display total thickness coated and coating speed | |
| 5 pcs quartz sensors (consumable) are included | |
| Water cooling is required | |
| Overall Dimensions | L6600mm× W660mm× H1200mm |
| Application Note | In order to remove oxygen from the chamber, suggest you use 5% Hytrogen + 95 % Nitrogen to clan chamber 2-3 times, which can reduce oxygen to below 10 ppm |
| Please use > 5N purity Argon gas for plasma sputtering. Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O | |
| Net Weight | 160 kg |
| Warranty | One years limited warranty with lifetime support |
Notes:
1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of the chamber.
2. DC power or RF power target is available
3. Different target material is optional
4. Strong magnetic target and Permanent magnetic target is optional
5. Magnetron sputtering coater with evaporation source is available
6. Customized service is always available!
Single target magnetron sputtering coater with DC powerSingle target magnetron sputtering coater with RF power
Desk bottom single target magnetron sputtering coater
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact us.
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